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次世代3次元デバイスの原子レベルでの等方性加工に対応したDCRエッチング装置「9060シリーズ」を発売

We have released the DCR etching equipment "9060 Series" that is compatible with isotropic processing at the atomic level of next-generation 3D devices.

Hitachi ·  Nov 26 23:00
  • We have released the DCR etching equipment "9060 Series" that is compatible with isotropic processing at the atomic level of next-generation 3D devices.
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