Longtu Optical Mask (688721.SH) stated during a specific object survey on October 28 that the Zhuhai fundraising project is currently in the process of process validation and customer sampling. The main production equipment such as electron beam lithography, dry etching, and inspection have been installed and debugged in the factory. Small-scale trial production will be carried out in the fourth quarter.

The company has conducted research and reserves on the technology of third-generation semiconductor masks, including research on PSM mask data processing technology, precise alignment research for secondary lithography, research on secondary coating and baking processes, and research on the grayscale detection method of PSM phase-shifting mask. It involves the entire process of CAM, lithography, and inspection of third-generation masks, and has achieved certain technological results, forming multiple intellectual property rights and proprietary technologies.

The depreciation period of the company's key production equipment is 10 years, and the fundraising project faces certain depreciation pressure. If the corresponding products can be successfully validated and gradually put into production, it is expected that the yield and production capacity ramp-up can be achieved as planned.