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佳能推出纳米压印半导体制造设备 纳米压印未来或将追赶光刻技术

Canon launches nanoimprinting semiconductor manufacturing equipment Nanoimprinting may catch up with lithography technology in the future

cls.cn ·  Oct 16, 2023 07:52

① Japan Canon announced the launch of the FPA-1200NZ2C Nano-imprinted Semiconductor Manufacturing device, which performs circuit pattern transfer, which is the most important semiconductor manufacturing process. ② market analysis pointed out that in the future, when optical lithography really reaches the limit and it is difficult to move forward, nano-imprinting technology may be a route worth looking forward to.

Japan's Canon announced on October 13th the launch of FPA-1200NZ2C nano-imprinted semiconductor manufacturing equipment, which performs circuit pattern transfer, which is the most important semiconductor manufacturing process.

Nano-imprint is to apply photoresist (PR) to the wafer and then press the impression with a specific pattern to form a circuit. Because it does not use lenses, the fine process can be realized at a lower cost than the existing exposure process. Nano-imprint is replaced by lithography, only the step of lithography is replaced by nano-suppression technology, other standard chip manufacturing processes such as etching, ion implantation and thin film deposition are fully compatible and can be well connected to the existing industry. you don't have to overturn and start all over again. According to relevant information, Canon and other international manufacturers intend to use nano-imprint technology to replace EUV lithography equipment in some integrated circuit fields to achieve lower-cost chip mass production. Canon's NIL technology makes the minimum linewidth of the pattern 14nm. With the further improvement of mask technology, NIL is expected to make the minimum linewidth of the circuit patterned to 10nm, which corresponds to 2nm nodes. Market analysis points out that when optical lithography really reaches its limit and it is difficult to move forward in the future, nanoimprinting technology may be a path to look forward to, and at that time, chip manufacturing may also usher in a new paradigm and everything will be subverted.

According to the theme database of the Financial Associated Press, among the relevant listed companies:

Medici KaiThe holding subsidiary has independent intellectual property rights and core technology in the field of nano-imprinting process. the company has successfully developed a wafer-level imprint optical module technology without substrate by using grayscale lithography, nano-imprint and wafer packaging technology.

Jingfang science and technologyThe holding company Anteryon of the Netherlands developed a wafer-level lens process including microlenses as early as 2008, and the Nano-imprint production line of Jingfang Optoelectronics, a subsidiary of the company, has also applied this process to automotive lighting products since 2019.

The translation is provided by third-party software.


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