This announcement is a separate document:
关于“集成电路化学机械抛光关键技术与装备”项目荣获2023年度国家技术发明奖一等奖的自愿性披露公告
The voluntary disclosure announcement of the "Key Technology and Equipment of Integrated Circuit Chemical Mechanical Polishing" project winning the first prize of the National Technology Invention Award in 2023.
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