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珠海:重点发展8英寸、12英寸硅片等新一代化合物半导体衬底材料及外延片

Zhuhai: Focus on developing new generation compound semiconductor substrate materials and epitaxial wafers such as 8-inch and 12-inch silicon wafers.

Breakings ·  Jan 7 09:46

The Zhuhai Municipal Bureau of Industry and Information Technology is publicly soliciting opinions on the "Zhuhai Electronic Chemicals Industry Development Three-Year Action Plan (2025-2027) (Draft for Comments)." It mentions that the focus is on developing 8-inch and 12-inch silicon wafers, new generation compound semiconductor substrate materials and epitaxial wafers such as Silicon Carbide, Gallium Nitride, and Indium Phosphide; looking ahead to plan for fourth generation semiconductor materials such as Gallium Oxide, Gallium Antimonide, and Indium Antimonide. At the same time, there is a focus on developing uniform chrome plate photomasks, KrF, and ArF phase-shift photomasks, and planning ahead for deep ultraviolet (DUV) masks.

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