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华海清科:“集成电路化学机械抛光关键技术与装备”项目荣获国家技术发明奖一等奖

Huahai Qingke's project 'Key Technology and Equipment for Integrated Circuit Chemical Mechanical Polishing' won the first prize of the National Technology Invention Award.

Breakings ·  Jun 24 16:27
Huahai Qingke Announcement: The "Key Technology and Equipment of Integrated Circuit Chemical Machinery Polishing" project completed jointly by the company and Tsinghua University won the first prize of the National Technical Invention Award in 2023. Lu Xinchun, the chairman of the company and the chief scientist, as the first person to complete the project, received the first prize certificate. The project has realized the domestic substitution in the field of CMP equipment in the domestic market, and the domestic market share has reached a high level. This award has no significant impact on the company's recent performance.

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